Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena

ISSN 0734-211XAmerican Institute of Physics
ScopusMatched via identifier

Journal overview

Journal identity
Titles
Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena
Key identifiers
ISSN
0734-211X
eISSN
2327-9877
NLM ID
Not available
Publisher / basic metadata
Publisher
American Institute of Physics
Country
Not available
Language
English

Indexing & coverage

Current indexing summary
Scopus
Previously indexed — discontinued

Scopus's Sources record lists this journal as inactive.

Indexing history
Coverage
1983–1985
Indexing services (MEDLINE, Embase)
Not available
Bibliographic inclusion (PubMed)
Not available
Full-text availability (PMC — not an indexing service)
Not available

Metrics

JIF
Not available

Publication activity

Publication activity
Publication activity data not available

Subjects & categories

Subjects / categories
Subject area (SCImago)
Not available
MeSH (PubMed)
Not available
Coverage / history
Scopus:1983-1985